Concept information
Preferred term
micro-electromechanical systems
Type
-
General concept
Broader concept
Entry terms
- MEMS
- microelectromechanical systems
Belongs to group
In other languages
-
Finnish
-
MEMS
-
Swedish
-
MEMS
-
mikroelektromekaniska system
URI
http://www.yso.fi/onto/yso/p40584
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